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.MEMS Mechanical Sensors.For a listing of recent titles in the Artech House Microelectromechanical

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.MEMS Mechanical Sensors .For a listing of recent titles in the Artech House Microelectromechanical Systems (MEMS) Series, turn to the back of this book. .MEMS Mechanical Sensors Stephen Beeby Graham Ensell Michael Kraft Neil White Artech House, Inc. Boston • London www.artechhouse.com .Library of Congress Cataloging-in-Publication Data A catalog record for this book is available from the U.S. Library of Congress. British Library Cataloguing in Publication Data Beeby, Stephen. MEMS mechanical sensors.— (Artech House MEMS library) 1. Microelectricalmechanical systems—Design and construction I. Beeby, Stephen 621.3’81 ISBN 1-58053-536-4 2. Transducers Cover design by Igor Valdman © 2004 ARTECH HOUSE, INC. 685 Canton Street Norwood, MA 02062 All rights reserved. Printed.

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