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Three-axis piezoresistive accelerometer with adjustable axial resolutions

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A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure. | Vietnam Journal of Mechanics, VAST, Vol. 34, No. 1 (2012), pp. 45 – 54 THREE-AXIS PIEZORESISTIVE ACCELEROMETER WITH ADJUSTABLE AXIAL RESOLUTIONS Bui Thu Hang, Tran Duc Tan, Chu Duc Trinh University of Engineering and Technology, VNU Abstract. A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure. Keywords: MicroElectroMechanical Systems (MEMS), accelerometer, piezoresistance. 1. INTRODUCTION Micro-machined inertial sensors that consist of accelerometers and gyroscopes have a significant percentage of silicon based sensors. Accelerometers have the second largest sale volume after pressure sensors [1] and can be found mainly in automotive industry, biomedical applications, household electronics, robotics, vibration analysis, navigation systems, and so on. Variety of accelerometers has increased based on different principles such as capacitive, piezoresistive, piezoelectric. The concept of accelerometer is not new, but the demand from commerce has motivated continuous research in order to minimize the size and improve its performance. The realistic applications create a huge motivation for the widely research of MEMS based sensors, especially accelerometers. In the modern world, applications require new sensors with smaller size and higher performance. However, there are few results which can bring out efficient and comprehensive methodologies for accelerometer designs in practice. 2. LITERATURE SURVEY AND LIMITATIONS OF EXISTING METHODS In fact, there is a lack of research which focuses on optimizing the performance of the multi-axis accelerometer. In 1997, Ramos J. [2] presented a lateral capacitive structure that could .