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Design And Simulation Of A Cmos-Mems Accelerometer

Design and Simulation of A CMOS-MEMS Accelerometer | Design and Simulation of A CMOS-MEMS Accelerometer by Gang Zhang B.S. Tsinghua University 1994 A Project Report Submitted to the Graduate School In Partial Fulfillment of the Requirements for the Degree of Master of Science in Electrical and Computer Engineering CARNEGIE MELLON UNIVERSITY Research Advisor Professor Gary K. Fedder Second Reader Professor L. Rick Carley May 1998 Technical Report Version Table of Contents 1 Introduction.3 2 Sensing Element Design.6 2.1 Overview.6 2.2 Mechanical Design and Analysis.7 2.2.1 Spring Design.8 2.2.2. Damping and Quality Factor.9 2.3 Vertical Stress Gradient Compensation with Curl Matching Technique.10 2.4 Fully Differential Capacitive Bridge Interface.12 2.4.1 Gap Capacitance of Composed Comb Fingers.13 2.4.2. Capacitive Bridge Model.14 2.4.3. Sensor Sensitivity.15 2.5. Electrostatic Forcing.16 2.5.1 Electrical Spring Softening.16 2.5.2 Electrostatic Force Feedback Actuators.17 3 Electrical Interface Circuitry Design.19 3.1 Introduction.19 3.2 Front-end Circuits.20 3.3 Demodulator Design.21 3.4 Noise Calculations.25 3.4.1 Brownian noise .26 3.4.2 Front-end Noise.27 3.4.2.1 Thermal Noise of MOS Devices.27 3.4.2.2 Diode Noise.28 3.4.2.3 Electronic Noise vs. Mechanical Noise .28 3.4.3 Quantization Noise.29 4 System Simulations .30 4.1 Introduction .30 4.2 Simulation Results.30 1 5 Experimental Results.32 5.1 Introduction.32 5.2 Experimental Results.32 6 Conclusions.37 7 Bibliography.38