Tuyển tập các báo cáo nghiên cứu khoa học ngành toán học được đăng trên tạp chí toán học quốc tế đề tài: Fabrication of a new type of organic-inorganic hybrid superlattice films combined with titanium oxide and polydiacetylene | Yoon et al. Nanoscale Research Letters 2012 7 71 http content 7 1 71 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access Fabrication of a new type of organic-inorganic hybrid superlattice films combined with titanium oxide and polydiacetylene Kwan-Hyuck Yoon Kyu-Seok Han and Myung-Mo Sung Abstract We fabricated a new organic-inorganic hybrid superlattice film using molecular layer deposition MLD combined with atomic layer deposition ALD . In the molecular layer deposition process polydiacetylene PDA layers were grown by repeated sequential adsorption of titanium tetrachloride and 2 4-hexadiyne-1 6-diol with ultraviolet polymerization under a substrate temperature of 100 C. Titanium oxide TiO2 inorganic layers were deposited at the same temperatures with alternating surface-saturating reactions of titanium tetrachloride and water. Ellipsometry analysis showed a self-limiting surface reaction process and linear growth of the nanohybrid films. The transmission electron microscopy analysis of the titanium oxide cross-linked polydiacetylene TiOPDA -TiO2 thin films confirmed the MLD growth rate and showed that the films are amorphous superlattices. Composition and polymerization of the films were confirmed by infrared spectroscopy. The TiOPDA-TiO2 nanohybrid superlattice films exhibited good thermal and mechanical stabilities. PACS organic-inorganic hybrid nanostructures polymerization film deposition chemical vapor deposition including plasma enhanced CVD MOCVD ALD etc. . Keywords organic-inorganic nanohybrid superlattices molecular layer deposition atomic layer deposition polydiacetylene. Background Organic-inorganic hybrid superlattice films have an attractive potential for the creation of new types of functional materials by combining organic and inorganic properties. The hybrid superlattice films provide both the stable and distinguished optical or electrical properties of .
