Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks | Marquez et al. Nanoscale Research Letters 2011 6 495 http content 6 1 495 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks 1 2 2 I- I 7 2 T- z- 2 2 Francisco Marquez Carmen Morant Vicente Lopez Felix Zamora Teresa Campo and Eduardo Elizalde Abstract Amorphous Si nanowires have been directly synthesized by a thermal processing of Si substrates. This method involves the deposition of an anodic aluminum oxide mask on a crystalline Si 100 substrate. Fe Au and Pt thin films with thicknesses of ca. 30 nm deposited on the anodic aluminum oxide-Si substrates have been used as catalysts. During the thermal treatment of the samples thin films of the metal catalysts are transformed in small nanoparticles incorporated within the pore structure of the anodic aluminum oxide mask directly in contact with the Si substrate. These homogeneously distributed metal nanoparticles are responsible for the growth of Si nanowires with regular diameter by a simple heating process at 800 C in an Ar-H2 atmosphere and without an additional Si source. The synthesized Si nanowires have been characterized by field emission scanning electron microscopy high-resolution transmission electron microscopy X-ray photoelectron spectroscopy and Raman. Keywords Si NWs AAO masks CVD Introduction One-dimensional semiconductor nanostructures have recently attracted intense research attention due to their novel physical properties 1-5 including electrical magnetic optical and mechanical and their potential for device applications in chemical and biological sensors optoelectronic transistors etc. 6-8 . All these properties and potential applications can be modulated by controlling the chemical composition and the dimensionality of the nanowires during the synthesis process 9 . Different methods have been used to synthesize Si nanowires Si NWs such as vapor-liquid-solid
