Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Generating and measuring the anisotropic elastic behaviour of Co thin films with oriented surface nano-strings on micro-cantilevers | Madurga et al. Nanoscale Research Letters 2011 6 325 http content 6 1 325 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access Generating and measuring the anisotropic elastic behaviour of Co thin films with oriented surface nano-strings on micro-cantilevers Vicente Madurga José Vergara and Cristina Favieres Abstract In this research the elastic behaviour of two Co thin films simultaneously deposited in an off-normal angle method was studied. Towards this end two Si micro-cantilevers were simultaneously coated using pulsed laser deposition at an oblique angle creating a Co nano-string surface morphology with a predetermined orientation. The selected position of each micro-cantilever during the coating process created longitudinal or transverse nano-strings. The anisotropic elastic behaviour of these Co films was determined by measuring the changes that took place in the resonant frequency of each micro-cantilever after this process of creating differently oriented plasma coatings had been completed. This differential procedure allowed us to determine the difference between the Young s modulus of the different films based on the different direction of the nano-strings. This difference was determined to be at least the 20 of the Young s modulus of the bulk Co. PACS . j Introduction The study of the elastic and mechanical properties of thin films is of interest in basic and applied research because thin films are used extensively in micro-electronic and micro-electromechanical systems. Because the elastic constants of thin films are different from those of bulk material of the same composition the elastic constants of the bulk material cannot be used to design thin film devices. Consequently it is very important to accurately determine the elastic constants of thin films. These properties can be studied using a wide variety of techniques including the analysis of the .
