Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Fabrication of ordered nanoporous anodic alumina prepatterned by mold-assisted chemical etching | Lai et al. Nanoscale Research Letters 2011 6 157 http content 6 1 157 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access Fabrication of ordered nanoporous anodic alumina prepatterned by mold-assisted chemical etching Kuan-Liang Lai1 Min-Hsiung Hon1 Ing-Chi Leu2 Abstract In this article a simple and cost-effective method to create patterned nanoindentations on Al surface via mold-assisted chemical etching process is demonstrated. This report shows the reaction-diffusion method which formed nanoscale shallow etch pits by the absorption liberation behaviors of chemical etchant in poly dimethylsiloxane stamp. During subsequent anodization it was possible to obtain the ordered nanopore arrays with 277 nm pitch that were guided by the prepatterned etch pits. The prepatterned etch pits obtained can guide the growth of AAO nanopores during anodization and facilitate the preparation of ordered nanopore arrays. Introduction In recent years nanoporous anodic aluminum oxide AAO has become a popular template system for the synthesis of various functional nanostructures which have extensive applications in scientific and commercial fields 1-4 . In the syntheis of template-based materials the template with long-range-ordered nanostructure is attractive in order that structurally well-defined materials can be consequently produced. In general Al anodization processes highly regular arrangement of pores however occurs only within a small process window and the domain size ordering length is usually limited to a micrometer scale on Al foils 5 6 . In order to achieve an ordered pore arrangement over a larger area Masuda et al. 5 7 developed a pretexturing process of Al using nanoimprinting with a SiC mold. Shallow indentations on an Al substrate initiate pore nucleation during anodization and lead to a long-range-ordered pore arrangement within the stamped area. Self-ordered and prepatterned guided growths are two kinds of .
