Sensors, Focus on Tactile, Force and Stress Sensors 2011 Part 3

Tham khảo tài liệu 'sensors, focus on tactile, force and stress sensors 2011 part 3', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 51 CMOS Force Sensor with Scanning Signal Process Circuit for Vertical Probe Card a b Fig. 19. The probe tip touches down the membrane of sensor a actual experiment b CCD camera. 5. Conclusion Probe cards play an extremely important role in the semiconductor industry. In this study we designed a CMOS piezoresistive force sensor to be applied to the probe cards. Capable of simultaneously monitoring the probe reacting force and electrical signals the designed sensor can help operators immediately identify a broken or a deformed probe and recognize that the received signals are erroneous. The repair time and cost of the probes can therefore be reduced. Further we adopted the TSMC pm 2P4M process to fabricate the CMOS force sensor that can be integrated with the circuit. According to the measurement results the designed sensor reports an average sensitivity of mV MPa V and a load-bearing capacity ranging from 0 to 3 g. 6. Acknowledgements The author would like to thank . Contact Probes Co. Ltd. for their help. We also thank the Chip Implementation Center of the National Science Council Taiwan . for supporting the TSMC CMOS process. The fund is granted from NSC 94-2622-E-027 -o47 -CC3. 7. References Iscoff R. 1994 . What s in the cards for wafer probing Semiconductor. Int. June 1994 pp. 76 Gilg L. 1997 . Know good die Journal of Electronic Testing Theory and Applications vol. 1o issue 1-2 April 1997 pp. 2019 ISSN 0923-8174 Ghalichechian N. Khbeis M. Ma Z. Moghadam S. Tan X. 2002 . Piezo-resistor pressure sensor cluster ENEE605 Final Project Report Fall 2002 Department of Electrical and Computer Engineering Group 2 University of Maryland Malhair C. Barbier D. 2003 . Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment Thin Solid Films vol. 427 issues 1-2 3 March 2003 pp. 362-366 ISSN 0040-6090 52 Sensors Focus on Tactile Force and Stress Sensors Yang L. J. Lai C. C. Dai C. L. Chang P. Z. .

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