Tham khảo tài liệu 'measurement process characterization_15', kỹ thuật - công nghệ, điện - điện tử phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | . Analysis and interpretation Level-2 standard deviations for 5 wafers Run 1 Run 2 DF Average Wafer Stddev Probe DF Average Stddev 138. 2362. 5 5 139. 2362. 5 5 140. 2362. 5 5 141. 2362. 5 5 142. 2362. 5 5 2362. Pooled 25 25 over 2 runs 50 Level-3 Level-3 standard deviations are computed from the averages of the two stability runs. Then the level-3 standard deviations are pooled over the five Stanford wafers to obtain a standard deviation with 5 degrees of freedom as deviations shown in the table below. computed from run averages and pooled over wafers http div898 handbook mpc section6 3 of 6 5 1 2006 10 13 13 AM . Analysis and interpretation Level-3 standard deviations for 5 wafers Wafer Stddev Probe DF Run 1 Average Run 2 Average Diff 138. 2362. 1 139. 2362. 1 140. 2362. 1 141. 2362. 1 142. 2362. 1 2362. 5 Pooled Graphs of A graphical analysis shows the relative biases among the 5 probes. For each probe wafer differences from the wafer average by probe are plotted versus wafer biases number. The graphs verify that probe 2362 coded as 5 is biased low relative to the other probes. The bias shows up more strongly after the probes have been in use run 2 . http div898 handbook mpc section6 4 of 6 5 1 2006 10 13 13 AM . Analysis and interpretation Formulas for computation of biases f for Biases by probe are shown in the following table. Differences Wafer 1 from Probe the mean Run 1 for each wafer Run 2 probe 2362 138. 1. 138. 281. 138. 283. 138. 2062. 138. 2362. 139. 1. .
