Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays | Nanoscale Res Lett 2008 3 521-523 DOI s11671-008-9190-9 NANO EXPRESS Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays Xiaoru Li Guojun Song Zhi Peng Xilin She Jianjiang Li Jin Sun Di Zhou Peidong Li Zengjun Shao Received 16 August 2008 Accepted 9 October 2008 Published online 30 October 2008 to the authors 2008 Abstract In this work we report that large area metal nanowire and polymer nanotube arrays were successfully patterned by photolithographic approach using anodic aluminum oxide AAO templates. Nanowires were produced by electrochemical deposition and nanotubes by solution-wetting. The highly ordered patterns of nanowire and nanotube arrays were observed using scanning electron microscopy SEM and found to stand free on the substrate. The method is expected to play an important role in the application of microdevices in the future. Keywords Pattern AAO Photolithographic approach Nanowire arrays Nanotube arrays Introduction Recent innovations in the areas of micro- and nanofabrication have created a unique opportunity for patterning surfaces with features the lateral dimensions of which span over the nano- to millimeter range. Micro- and nanometer scale patterns can be obtained by photolithography 1-4 electron beam lithography 5 6 soft lithography 7 micro-contact printing CP 8-11 . These techniques above have partially the same process they can transfer patterns onto the surface X. Li G. Song El Z. Peng X. She J. Li J. Sun D. Zhou P. Li Z. Shao Institute of Polymer Materials Qingdao University No. 308 Ningxia Road Qingdao 266071 People s Republic of China e-mail songguojunqdu@ X. Li e-mail lixr@ of a substrate. With the development of nanotechnology a variety of industries such as biosensor 12 proteomic arrays 13 and multifunctional coatings 14 have focused on obtaining patterns with the smallest possible lateral dimensions 15 . Photolithography is one of the most successful techniques available in .
