Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: High-rate low-temperature dc pulsed magnetron sputtering of photocatalytic TiO2 films: the effect of repetition frequency | Nanoscale Res Lett 2007 2 123-129 DOI s11671-007-9042-z NANO EXPRESS High-rate low-temperature dc pulsed magnetron sputtering of photocatalytic TiO2 films the effect of repetition frequency J. Sicha D. Herman J. Musil Z. Stryhal J. Pavlik Published online 27 February 2007 To the authors 2007 Abstract The article reports on low-temperature high-rate sputtering of hydrophilic transparent TiO2 thin films using dc dual magnetron DM sputtering in Ar O2 mixture on unheated glass substrates. The DM was operated in a bipolar asymmetric mode and was equipped with Ti targets of 50 mm in diameter. The substrate surface temperature Tsurf measured by a thermostrip was less than 180 C for all experiments. The effect of the repetition frequency fr was investigated in detail. It was found that the increase of fr from 100 to 350 kHz leads to a an improvement of the efficiency of the deposition process that results in a significant increase of the deposition rate aD of sputtered TiO2 films and b a decrease of peak pulse voltage and sustaining of the magnetron discharge at higher target power densities. It was demonstrated that several hundreds nm thick hydrophilic TiO2 films can be sputtered on unheated glass substrates at aD 80 nm min Tsurf 180 C when high value of fr 350 kHz was used. Properties of a thin hydrophilic TiO2 film deposited on a polycarbonate substrate are given. Keywords TiO2 film Hydrophilicity Deposition rate Unheated substrate Dual magnetron sputtering Polycarbonate J. Sicha D. Herman J. Musil El Department of Physics University of West Bohemia Univerzitni 22 Pilsen 306 14 Czech Republic e-mail musil@ Z. Stryhal J. Pavlik Department of Physics . Purkyne University Ceske mladeze 8 Usti nad Labem 400 96 Czech Republic Introduction Titanium dioxide TiO2 is well known photocatalyst with good chemical stability high refractive index nontoxicity and good mechanical hardness. In recent years photoinduced hydrophilicity characterized by the .
