Surface Acoustic Wave (SAW) devices are widely used in multitude of device concepts mainly in Micro Electro Mechanical Systems (MEMS) and communication electronics. As such, SAW based micro-sensors, actuators and communication electronic devices are well known applications of SAW technology. Due to their solid state design and fabrication compatible with other modern technologies such as Microwave Integrated Circuits (MIC), MEMS, (Charge Coupled Devices) CCD and integrated optic devices, SAW based sensors are considered to be extremely reliable
