Applications of microelectromechanical systems (MEMS) and microfabrication have spread to different fields of engineering and science in recent years. Perhaps the most exciting development in the application of MEMS technology has occurred in the biological and biomedical areas. In addition to key fluidic components, such as microvalves, pumps, and all kinds of novel sensors that can be used for biological and biomedical analysis and measurements, many other types of so-called micro total analysis systems (TAS) have been developed. The advantages of such systems are that microvolumes of biological or biomedical samples can be delivered and processed for testing and analysis in an integrated fashion, thereby dramatically reducing the required human.
