This book is designed for a one-semester course on Nano- and Microelectromechanical Systems or Nano- and Microengineering. A typical background needed includes calculus, electromagnetics, and physics. The purpose of this book is to bring together in one place the various methods, techniques, and technologies that students and engineers need in solving a wide array of engineering problems in formulation, modeling, analysis, design, and optimization of high-performance microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). This book is not intended to cover fabrication aspects and technologies because a great number of books are available. At the same time, extremely important issues in analysis, design, modeling, optimization, and simulation of NEMS and MEMS have.
