.Mechanics of Microelectromechanical Systems .This page intentionally left blank .Nicolae Lobontiu Ephrahim Garcia Mechanics of Microelectromechanical Systems KLUWER ACADEMIC PUBLISHERS NEW YORK, BOSTON, DORDRECHT, LONDON, MOSCOW .eBook ISBN: Print ISBN: 0-387-23037-8 1-4020-8013-1 ©2005 Springer Science + Business Media, Inc. Print ©2005 Kluwer Academic Publishers Boston All rights reserved No part of this eBook may be reproduced or transmitted in any form or by any means, electronic, mechanical, recording, or otherwise, without written consent from the Publisher Created in the United States of America Visit Springer's eBookstore at: and the Springer Global Website Online at:
