Digital Elevation Model (DEM) is an important component of GIS applications in many socio-economic areas. Especially, DEM has a very important role in monitoring and managing natural resources, preventing natural hazards, and supporting spatial decision making. Usually, DEM is built by interpolation from a limited set of sample points. Thus, the accuracy of the DEM is depended on the used interpolation method. By analyzing the data of experimental DEM creation using three popular interpolation techniques (inverse distance weighted - IDW, spline, and kriging) in four different survey projects (Thai Nguyen, Go Cong Tay, Co Loa, and Duong.