In this paper, we investigate wedge mode propagation characteristics of a triangularshaped surface plasmon waveguide. This structure consists of a thin metal layer deposited onto the surface of a triangular–shaped silicon waveguide which could be fabricated on a silicon–on– insulator wafer by wet–bulk micromachining. | VNU Journal of Science: Mathematics – Physics, Vol. 32, No. 3 (2016) 41-48 Wedge Mode Propagation Characteristics of Triangular–shaped Surface Plasmon Waveguide Nguyen Van Chinh, Nguyen Thanh Huong, Chu Manh Hoang * International Training Institute for Materials Science, Hanoi University of Sciences and Technology, , Dai Co Viet, Hai Ba Trung, Hanoi, Vietnam Received 15 September 2016 Revised 28 September 2016; Accepted 30 September 2016 Abstract: In this paper, we investigate wedge mode propagation characteristics of a triangularshaped surface plasmon waveguide. This structure consists of a thin metal layer deposited onto the surface of a triangular–shaped silicon waveguide which could be fabricated on a silicon–on– insulator wafer by wet–bulk micromachining. These elements are embedded in a dielectric medium (such as air) to form metal–dielectric interface and the surface plasmon wave propagates at the wedge of metal layer. The influence of structural parameters such as metal layer, height of silicon waveguide and effect of fabrication on the wedge mode propagation characteristics of the waveguide is analyzed by using numerical simulation. Keywords: V–shaped waveguide, Surface plasmon polariton, plasmonic waveguide. 1. Introduction Surface Plasmon Polariton (SPP) is surface electromagnetic wave which propagates at the metal– dielectric interface. It is the result of the strong coupling between light and collective oscillation of free electron at a metal surface. In recent decades, the study on the theories and applications of SPP is growing fast and separated in a new field – Plasmonics. As a surface wave, the propagation of SPP is highly sensitive to the roughness and the electromagnetic field is confined in the space near the interface of the medium. There are many studies on novel devices to apply the sensitivity of SPP for biosensors [1–3]. In these structures, the interaction of biological reagents will change the surface properties of devices. .