Micro electromechanical systems (MEMS) based capacitive pressure sensor for ultral-low pressure using graphene has been proposed. The characteristics of sensor such as membrane displacement, capacitance and sensitivity of sensor with external pressure effect are simulated and analyzed using Comsol Multiphysics software. The obtained results show that the MEMS capacitive pressure sensor using 3, 5, 7-layer graphene exhibits the sensitivity of aF/Pa, aF/Pa and aF/Pa, respectively. | Trường Đại học Vinh Tạp chí khoa học, Tập 47, Số 1A (2018), tr. 41-46 MODELING AND ANALYSIC OF MEMS CAPACITIVE PRESSURE SENSOR USING GRAPHENE MEMBRANE Nguyen Thi Minh Vinh University Received on 01/4/2018, accepted for publication on 12/6/2018 Abstract: Micro electromechanical systems (MEMS) based capacitive pressure sensor for ultral-low pressure using graphene has been proposed. The characteristics of sensor such as membrane displacement, capacitance and sensitivity of sensor with external pressure effect are simulated and analyzed using Comsol Multiphysics software. The obtained results show that the MEMS capacitive pressure sensor using 3, 5, 7-layer graphene exhibits the sensitivity of aF/Pa, aF/Pa and aF/Pa, respectively. 1. INTRODUCTION Nowadays, micro electromechanical system (MEMS) devices are commercially available in many applications, such as acceleration and pressure sensors, etc. Among the potential MEMS devices, pressure sensor has been studied extensively for both industrial and medical applications due to its small size (from µm to mm), high performance, high reliability and low cost. There are some types of pressure sensors including piezoelectric, piezoresistive and capacitive sensors [3, 5, 8]. Compared to piezoelectric and piezoresistive, capacitive sensor has more attracted attention for practical applications because of its high sensitivity, low power and compatible with IC [3]. In particular, most of studies of MEMS capacitive pressure sensors focused on improving the sensitivity of the pressure sensor using variation of material and optimization of shape and size of sensors [1, 4]. Among these approaches, graphene has been extensively studied as the most potential material to improve the sensitivity of sensor. In this paper, we report the design and simulation of MEMS capacitive pressure sensor using graphene membrance which is based on Comsol Multiphysics simulation. The dimensions of graphene membrane are 10 µm x 10 .
