The aim of this work is to utilize ultrasonic vibration with frequency of 35 kHz and amplitude of 3 µm to improve the filling ability of K-PSK100 glass into pyramid shaped-microcavities. This study also proposed to use an impression mold to enhance the filling ability for the glass. Experimental data showed that microformability of glass material could be improved 17 % under effect of ultrasonic vibration and more 3 % as using the impression mold. | Journal of Science & Technology 122 (2017) 017-021 Effect of Ultrasonic Vibration on Microstructure Hot Glass Embossing Process 1 Lan Phuong Nguyen1*, Ming-Hui Wu2, Chinghua Hung2 Hanoi University of Science and Technology, No. 1, Dai Co Viet Road, Hai Ba Trung, Hanoi, Viet Nam 2 National Chiao Tung University, No. 1001, University Road, Hsinchu, Taiwan, . Received: March 31, 2017; Accepted: November 03, 2017 Abstract Hot glass embossing is a novel technology to manufacture microstructures for Field Emission Displays. By this technology, microstructures on the mold could be embossed on the glass surface with high quality and lower cost. Although effect of ultrasonic vibration on micro-formability of glass material has been studied in some previous research, no consideration has been performed with pyramid array which possesses small tip angle. The aim of this work is to utilize ultrasonic vibration with frequency of 35 kHz and amplitude of 3 µm to improve the filling ability of K-PSK100 glass into pyramid shaped-microcavities. This study also proposed to use an impression mold to enhance the filling ability for the glass. Experimental data showed that microformability of glass material could be improved 17 % under effect of ultrasonic vibration and more 3 % as using the impression mold. Keywords: ultrasonic vibration, hot glass embossing, pyramid array, impression mold 1. Introduction embossing process. Recently, Nguyen et al. [3] has performed some experiments to study effect of some parameters on force reduction under effect of ultrasonic vibration by using different embossing speeds, changing various embossing temperatures and extending the applying time of ultrasonic vibration. Hot * glass embossing technology is one of novel methods to produce microtips in Field Emission Displays with high quality and low cost. Especially, micro-formability of glass material could be improved significantly with the assistance of ultrasonic vibration. A conventional