A new method determining the equivalent dynamic parameters such as stiffness, vibrating mass, and air damping factor in motion direction of shuttle (. in ydirection) is proposed, thence the differential motion equation of shuttle is established and solved to achieve a typical displacement formula. | Vietnam Journal of Mechanics, VAST, Vol. 40, No. 4 (2018), pp. 397 – 406 DOI: INFLUENCE OF THE DRIVING FREQUENCY AND EQUIVALENT PARAMETERS ON DISPLACEMENT AMPLITUDE OF ELECTROSTATIC LINEAR COMB ACTUATOR Hoang Trung Kien1 , Vu Cong Ham2 , Pham Hong Phuc1,∗ 1 Hanoi University of Science and Technology, Vietnam 2 Le Quy Don University, Vietnam ∗ E-mail: Received Octorber 22, 2018 Abstract. A new method determining the equivalent dynamic parameters such as stiffness, vibrating mass, and air damping factor in motion direction of shuttle (. in ydirection) is proposed, thence the differential motion equation of shuttle is established and solved to achieve a typical displacement formula. Simulation and experimental results show that the change of ELCA’ displacement is inappreciable while the range of driving frequency up to 27 Hz (error of 10% with driving voltage is a square wave). Moreover, the range of driving frequency for the ELCA can be extended up to 1 kHz with displacement amplitude error of 10% while the shape of driving voltage is a harmonic sine wave. Keywords: Electrostatic Linear Comb Actuator (ELCA), driving frequency, dynamic parameters, displacement amplitude. 1. INTRODUCTION Micro electromechanical system (MEMS) is an advance technology and widely applied in many fields like robotics, transportation, aerospace, medicine, or in electronic industry, etc. Micro actuators are one of the MEMS products and play an important role which generates a power to drive the micro devices as well as micro systems. Electrostatic Linear Comb Actuator (ELCA) is a typical actuator with working principle based on the electrostatic force producing linear movement. The advantages of the ELCA system are fast response, high performance, low energy consumption, and simple configuration. That is the reason why it is commonly used for driving MEMS devices, such as resonators [1], gyroscopes [2], micro .
