In this note, the control systems of this stage are presented. In order not to stimulate the eigenfrequencies of the stage, a fourth order track planning method is used to derive the command curve for motion control. Moreover, a friction model based feedforward controller is added to compensate the effect of friction. Experimental results are presented to show the performance of this stage. | Journal of Automation and Control Engineering Vol. 4, No. 5, October 2016 Performance Enhancements of a High Precision Scanning Stage Jing-Chung Shen and Chi-Huang Hwang Department of Automation Engineering, National Formosa University, Winlin, Huwei, Taiwan Email: jcshen@ Abstract—Recently, a two dimensional high precision scanning stage was developed at the Department of Automation Engineering, National Formosa University, Taiwan. This stage is composed by two stages, a two-degrees-of-freedom (DOF) (X and Y) linear cross roller guide way supported stage and a 4-DOF (Z, θx, θy and θz) piezo-stage. Two linear shaft voice coil motor are used to actuate the roller guided X-Y stage and five piezoelectric actuators are used in the piezo-stage. The working range of the stage is 25 mm × 25 mm. The piezo-stage is used to compensate the vertical position, row, pitch and yow errors throughout the whole working range. In this note, the control systems of this stage are presented. In order not to stimulate the eigenfrequencies of the stage, a fourth order track planning method is used to derive the command curve for motion control. Moreover, a friction model based feedforward controller is added to compensate the effect of friction. Experimental results are presented to show the performance of this stage. Index Terms—precision scanning stage, piezoelectric, six-degrees-of-freedom, voice coil motor, track planning, friction compensation I. INTRODUCTION In micro and nano-technology, positioning with high resolution is necessary for measuring or manipulating objects. In general, high precision stage is used to realize these tasks. Today’s technology progress in electronics, the semiconductor industry, the optical industry, biotechnology and many others arise the need for operation range in mm ranges of such stages. Recently, several precision stages that can reach mm ranges were presented. For working ranges in about sever to several tens millimeters, .
