Bài viết này đề cập đến kỹ thuật chế tạo để tạo ra các vi kênh bằng cách sử dụng máy Laze CO2 có đầu lắc Galvo công suất 40W. Phương pháp này có thể điều khiển kích thước vi kênh bằng cách thay đổi công suất, tốc độ quét, thời gian quét của nguồn laze. | Chế tạo kênh vi lưu sử dụng laze CO2 đầu lắc Galvo kết hợp với phương pháp ép kênh cơ học VNU Journal of Science: Natural Sciences and Technology, Vol. 35, No. 2 (2019) 112-120 Original Article Fabrication of Microchannels by Using the CO2 Galvo Laser Marking Machine and Thermo-mechanical Sealing Method Ho Anh Tam*, Nguyen Viet Hung, Nguyen Huu Duc, Do Thi Huong Giang Key Laboratory for Micro-Nano Technology, VNU University of Engineering and Technology, 144 Xuan Thuy, Cau Giay, Hanoi, Vietnam Received 29 May 2019 Revised 08 June 2019; Accepted 10 June 2019 Abstract: Microchannel in microtechnology is a channel with a hydraulic diameter below 1 mm. Microchannels are primarily used in biomedical devices and microfluidic applications. Fabrication of microchannels has always been a complex task even at the world centres of excellence. This article addresses the fabrication techniques for creating microchannels using a 40W CO2 Galvo laser marking machine. It was able to control the channel dimensions by changing the power, scanning speed, and scanning time of the laser source. The results show that the created channel width increased as the laser power increased and the scanning speed decreased. Similarly, the channel depth increased as the laser power increased. Successfully tested in the laminar flow and droplet modes, the created microchannels were sealed using the thermo-mechanical method at 220oC. This is a new method for faster and cheaper production of microdevices that could be explored for sustainable development in the industry. The article concludes that with an appropriate solution, microchannels with minimal width and depth dimensions of 50 µm × 50 µm can be developed with channel roughness of 2-3µm. Keywords: Microfluidics, microchannels, CO2 marking machine, Galvo, mechanical sealing method. * _ * Corresponding author. E-mail address: .
