Manipulating light by subwavelength resonators via plasmonic metasurface is currently studied intensively for various novel THz and optical applications. In this report, we present the fabrication of a simple plasmonic metasurface operating at infrared frequencies using the UV lithography and electron beam evaporation techniques. | Fabrication and characterization of an infrared plasmonic metasurface Vật lý FABRICATION AND CHARACTERIZATION OF AN INFRARED PLASMONIC METASURFACE Nguyen Thanh Tung* Abstract: Manipulating light by subwavelength resonators via plasmonic metasurface is currently studied intensively for various novel THz and optical applications. In this report, we present the fabrication of a simple plasmonic metasurface operating at infrared frequencies using the UV lithography and electron beam evaporation techniques. The strong plasmonic behavior of fabricated samples is then investigated by the micro Fourier transformed infrared spectroscopy. The parametric dependent plasmonics is discussed in light of measured results. Keywords: Metasurface, Plasmonic, Infrared frequency. 1. INTRODUCTION The interaction between electromagnetic waves and matters has been one of central problems in physics and materials science for many years. Exploring novel electromagnetic properties of matters and materials allows us to design and controll the wave propagation in a certain medium that lead to dozens of microwave, THz, and optical applications [1]. Unfortunately, the variability of the electromagnetic properties in naturally occuring materials is not always controllable since it rigorously depends on intrinsic nature of materials and their formation conditions as well. In order to brigde this gap, a new class of artificial metal-dielectric materials, the so-called metamaterials, was introduced to arbitrarily tailor electromagnetic properties of a medium without having material constitutes changed [2]. The main advantage of metamaterials is of its subwavelength resonators. These resonators are periodically arranged to effectively enact macroscopic electromagnetic behavior of the medium, in which the subwavelength resonators are embedded. For example, the refractive index in metamaterials can be tuned from positivity to negativity by .