Sensor based on thick film of ZnO hollow microspheres with average thickness about 200 µm were obtained by spin-coating technique. The surface of the film was modified by NiO through dropping solution of Ni(NO3)2 onto the film to reach mass ratio of Ni(NO3)2 to ZnO of 1 %. Subsequently, the obtained film was calcined at 500 oC for 2 h. Upon calcination, Ni(NO3)2 would reduce to NiO. | UV-LED assisted ethanol sensing properties of NiO modified ZnO thick film at low temperatures