Luận án Tiến sĩ Điện tử Viễn thông: Design, simulation, fabrication and performance analysis of a piezoresistive micro accelerometer

One of the important contributions of this thesis is that a hierarchical MEMS design synthesis and optimization process have been developed for and validated by the design of a specific structure of MEMS based accelerometer. | Luận án Tiến sĩ Điện tử Viễn thông Design simulation fabrication and performance analysis of a piezoresistive micro accelerometer CONTENTS Declaration Abbreviation amp Notations List of Tables List of Figures and Graphs CHAPTER 1. 2 INTRODUCTION . 2 Motivation and Objectives of This Thesis . 2 Overview of MEMS . 3 Reviews on Silicon Micro Accelerometers . 4 Reviews on Development of Multi-Axis Accelerometers . 7 Reviews on Performance Optimization of Multi-Axis Accelerometers . 10 Content of the Thesis . 12 CHAPTER 2. 14 TRENDS IN DESIGN CONCEPTS FOR MEMS APPLIED FOR PIEZORESISTIVE ACCELEROMETER . 14 Open-loop Accelerometers. 14 Piezoresistive Accelerometer . 21 Overview of MNA and FEM Softwares . 35 Summary . 41 CHAPTER 3. 42 DESIGN PRINCIPLES AND ILLUSTRATING APPLICATION A 3-DOF ACCELEROMETER . 42 Introductions . 42 Working Principle for a 3-DOF Accelerometers . 42 A Systematic and Efficient Approach of Designing Accelerometers. 44 Structure Analysis and the Design of the Piezoresistive Sensor . 52 Measurement Circuits . 57 Multiphysic Analysis of the 3-DOF Accelerometer . 61 Design Simulation Fabrication and Performance Analysis of a Piezoresistive Micro Accelerometer Noise Analysis . 68 Mask Design . 72 Summary . 77 CHAPTER 4. 79 FABRICATION AND CALIBRATION OF THE 3-DOF ACCELEROMETER . 79 Fabrication Process of the Acceleration Sensor . 79 Measurement Results . 89 Summary . 100 CHAPTER 5. 101 OPTIMIZATION BASED ON FABRICATED SENSOR . 101 Introductions . 101 Pareto Optimality Processes . 101 Summary . 110 CONCLUSIONS . 111 Design Simulation Fabrication and Performance Analysis of a Piezoresistive Micro Accelerometer CHAPTER 1 INTRODUCTION Motivation and Objectives of This Thesis During the last decades MEMS technology has undergone rapid development leading to the successful fabrication of miniaturized mechanical structures integrated with microelectronic .