Microswitches have been used for many different applications in building, automation, and security due to requiring little force. A novel design of a triple-stepped beam structure for a mechanical bistable microswitch is presented, and it was found that the bistability of the beam can be achieved by applying an electrostatic force which allows a high deflection with small electrode separation. A finite element method analysis has been used to design the bistable microswitch in a certain range of geometries based on the standard of Taiwan Semiconductor Manufacturing Company (TSMC). |
