Scope of thesis: Fabrication and characteristics of single-layer nitride hard coating with multi-components (TiAlXN (X: Si, B, V)) and multi-layer nitride hard coating with multi-components TiAlXN/CrN (X: Si, B) with high hardness and low friction coefficient; to determine the influence of main parameters on the properties of coatings. | MINISTRY OF EDUCATION VIETNAM ACADEMY OF AND TRAINING SCIENCE AND TECHNOLOGY GRADUEATE UNIVERSITY SCIENCE AND TECHNOLOGY - LUONG VAN DUONG FABRICATION AND CHARACTERIZATION OF NITRIDE COATINGS ON WC-Co HARD ALLOY BY MAGNETRON SPUTTERING Major Metal Science Code SUMMARY OF MATERIASLS SCIENCE DOCTORAL THESIS HANOI 2019 PREFACE 1. Urgency of the thesis The abrasion and corrosion are the cause of energy loss and material loss which reduced performace and lifetime of cutting tools and machine parts in industry. In industrialized countries some 30 of all energy generated is ultimately lost through friction. In the highly industrialized countries losses due to friction and wear are put at between 1 and 2 of gross national product. Therefore research on fabrication and devolope the coatings with excellent properties such as high hardness low friction coeficience high corrosion resistance and thermal stability are in great demand in moderm industry 1 . Over the past several decades the coatings with different features from single-layer films with single element such as TiN 2- 3 TiC 4-6 CrN 7 -9 to single-layer films with multi-element such as TiAlN 10-11 TiAlSiN 12 TiAlBN have been studied. In addition the fabrication of TiN CrN and TiAlN CrN multilayer films to combine the good characteristics of each monolayer is also studied and developed simultaneously 14-15 . For fabrication of the coatings some methods such as physical vapor deposition PVD chemical vapor deposition CVD and physical chemistry have been used. However the PVD method is commonly used because it has high performance good adhesion high density and can deposite on large tools and parts. In Vietnam the study on fabrication of nitride coatings have been attracted the attention of many research groups in both fabrication technology and applications at Universities and Institutes such as Hanoi university of Science and Technology University of 1 Science Vietnam National University Ho Chi Minh City The
