The thermoelastic damping (TED) and support loss are involved to calculate the total Q-factor of micro-beam resonator. The effect of surface roughness pattern (film thickness ratio and Peklenik number) on Q-factors of micro-beam resonators is then discussed. It is found that the effect of roughness pattern becomes more considerably on Q-factor in lower gas rarefaction (higher pressure) and higher effective viscosity of the gas. |