Ericson, E.; et. al “Mechanical Properties of Materials in Microstructure.” Handbook of Micro/Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 1999 © 1999 by CRC Press LLC Mechanical Properties of Materials in Microstructure Technology Fredric Ericson and Jan-Åke Schweitz Introduction Cohesion and Crystal Structures System Energy and Interatomic Binding • Lattice Structures and Structural Defects 15 Elasticity Properties Isotropic Elasticity • Anisotropic Elasticity Internal Stresses Thermal Film Stress • Intrinsic Film Stress • Substrate and Interface Stresses Plasticity and Thermomechanical Properties Elastic–Ductile Response • Time-Dependent Effects Fracture Properties Fracture Limit and Fracture Toughness • Some Fracture Data • Fracture Initiation • Weibull Statistics • Fatigue Adhesive Properties. | IEricson 1. el. al Mechanical Properties of Materials in Microstructure. Handbook of Micro Nanotribology. Ed. Bharat Bhushan Boca Raton CRC Press LLC 1999 1999 by CRC Press LLC 15 Mechanical Properties of Materials in Microstructure Technology Fredric Ericson and Jan-Ake Schweitz Introduction Cohesion and Crystal Structures System Energy and Interatomic Binding Lattice Structures and Structural Defects Elasticity Properties Isotropic Elasticity Anisotropic Elasticity Internal Stresses Thermal Film Stress Intrinsic Film Stress Substrate and Interface Stresses Plasticity and Thermomechanical Properties Elastic-Ductile Response Time-Dependent Effects Fracture Properties Fracture Limit and Fracture Toughness Some Fracture Data Fracture Initiation Weibull Statistics Fatigue Adhesive Properties and Influence of Coatings Adhesion Influence of Coatings Testing General Test Structures and Testing Methods Elasticity Testing by Static Techniques Elasticity Testing by Dynamic Techniques Testing of Other Properties Modeling and Error Analysis Single-Layer Beam Two-Layer Beam Resonant Beam Micro vs. Bulk Results Summary and Conclusions References Introduction Mechanical properties are of critical importance to any material that is used for transmission of forces or moments or just for sustaining loads. The gradual introduction of microcomponents in practical 1999 by CRC Press LLC applications within microstructure technology MST has instigated an increasing demand for insight into the fundamental factors that determine the mechanical integrity of such elements for instance their long-term reliability or how to choose proper safety limits in design and use. The mechanical integrity of a microsystem is not only of importance in mechanical applications. It is not unusual that mechanical or thermomechanical integrity is a prerequisite for reliable performance of microsystems with primarily nonmechanical functions . electric
