Tham khảo tài liệu 'engineering statistics handbook episode 4 part 14', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | . Define Sampling Plan ENGINEERING STATISTICS HANDBOOK hW tools raids search BACK Nixf 3. Production Process Characterization . Data Collection for PPC . Define Sampling Plan Sampling plan is detailed outline of measurements to be taken A sampling plan is a detailed outline of which measurements will be taken at what times on which material in what manner and by whom. Sampling plans should be designed in such a way that the resulting data will contain a representative sample of the parameters of interest and allow for all questions as stated in the goals to be answered. Steps in the The steps involved in developing a sampling plan are sampling plan 1. identify the parameters to be measured the range of possible values and the required resolution 2. design a sampling scheme that details how and when samples will be taken 3. select sample sizes 4. design data storage formats 5. assign roles and responsibilities Verify and Once the sampling plan has been developed it can be verified and then execute passed on to the responsible parties for execution. NIST SEMATECH HOME TOOLS AID S SEARCH BACK NEXT http div898 handbook ppc section3 5 1 2006 10 17 36 AM . Identifying Parameters Ranges and Resolution Resolution helps choose measurement equipment Finally the required resolution for the measurements should be specified. This specification will help guide the choice of metrology equipment and help define the measurement procedures. As a rule of thumb we would like our measurement resolution to be at least 1 10 of our tolerance. For the oxide growth example this means that we want to measure with an accuracy of 2 Angstroms. Similarly for the turning operation we would need to measure the diameter within .001 . This means that vernier calipers would be adequate as the measurement device for this application. Examples Click on each of the links below to see the parameter descriptions for each of the case studies. 1. Case Study 1 .
