Hủy bỏ các khung vận chuyển và cửa hàng với hộp Kích thước 3100 vận chuyển trong trường hợp kính hiển vi phải được vận chuyển để bảo trì, sửa chữa. Giải nén tất cả các thành phần hệ thống. Mỗi của các mục dưới đây được vận chuyển trong hộp riêng biệt: • Kích thước 3100 Kính hiển vi • NanoScope IIIa điều khiển (nếu có) • Kích thước 3100 điều khiển • | Cantilever Preparation Tip Shape of Etched Silicon Probes continued. Measurements of line pitch are often best measured using the side-to-side faces of the tip which exhibits symmetry. Because of the approximate 17 half angle of the tip the line or space measurement is best done at the top of the line for simplification of the measurement artifacts See Figure . 6niiiii iuiiiim ommon Silicon Probe Profile Resultant Scan Artifact Subsequent scan line produced using the realistic tip shape Scan-Line-Pioiile Note Any wall angle on the left wall that is 55 deg. will be shown as 55 deg. in the image. Any wall angle on the right wall that is 70-80 deg. will be shown as 70 - 80 deg. in the image. Figure depicts the resultant effect of the angled back ridge on the step angle measurement for a deeper trench depth. This is tip and topography dependent. In addition to microscopic scale shape characteristics See Figure another factor which can affect the wall angle over shorter nominal 100 nm step height measurements is the shaped cusp at the end of the tip. The shaped cusp at the end of the tip is formed to increase the sharpness of the tip point to a length of 100 nm from the end of the tip. It is formed in such a manner that the radius of curvature of a silicon tip can be in the range of 5-10 nm on a very good tip . 6-8 Dimension 3100 Manual Rev. B Cantilever Preparation Tip Shape of Etched Silicon Probes continued. Measurements of line pitch are often best measured using the side-to-side faces of the tip which exhibits symmetry. Because of the approximate 17 half angle of the tip the line or space measurement is best done at the top of the line for simplification of the measurement artifacts See Figure . 6niiiii iuiiiim ommon Silicon Probe Profile Resultant Scan Artifact Subsequent scan line produced using the realistic tip shape Scan-Line-Pioiile Note Any wall angle on the left wall that is 55 deg. will be shown as 55 deg. in the
