Lưu ý: Đối với các phiên bản phần mềm 4,23 và thấp hơn, có không riêng biệt Analog 2 thiết lập trong bảng điều khiển Interleave. Set Analog 2 Phản hồi các Controls bảng điều khiển để 0 volt. 9. Trong bảng điều khiển Interleave thiết lập Analog 2 với điện áp mong muốn. Lưu ý: | Calibration Measure Horizontally at 440 Scan Size continued. 8. Multiply the quotient obtained above by the Diiiiiiiiiiirrkahie. shown on the IIIIIIIIIIII HiiiHrnrniripanel 9. Enter the new value. The new value adjusts the scanner s fast axis to more closely match calculated distances with actual feature distances. The new sensitivity setting takes effect as soon as it is entered. 10. To save it to the computer s hard disk click on 2C. This closes the IIIIIIIIIIII HiiiMnniiiiii I panel. Measure Vertically at 440V Scan Size 1. Return to the image of the calibration reference. 2. Clear the horizontal line drawn earlier and click the right mouse button or click on n mn 3. Draw a vertical line between features. 4. Wait for at least three full scans to allow the piezo to stabilize then select two widely spaced features and draw a line connecting like portions of features top edge-to-top edge etc. . The SPM displays the calculated distance between features. 5. Verify that the microscope s calculated distance agrees with the known vertical distance. If there is significant disagreement between the two fine tuning is required go to the next step. If the displayed distance agrees with the known distance skip to Section . 6. Based upon the results from the step above divide the known distance by the distance displayed next to the line drawn a few steps earlier. Known distance between features SPM-calculated distance between features 17-30 Dimension 3100 Manual Rev. B Calibration Measure Horizontally at 440 Scan Size continued. 8. Multiply the quotient obtained above by the Diiiiiiiiiiirrkahie. shown on the IIIIIIIIIIII HiiiHrnrniripanel 9. Enter the new value. The new value adjusts the scanner s fast axis to more closely match calculated distances with actual feature distances. The new sensitivity setting takes effect as soon as it is entered. 10. To save it to the computer s hard disk click on 2C. This closes the IIIIIIIIIIII HiiiMnniiiiii I panel. .
