In those early, heady, exciting, and terribly uncertain days, many issues faced those in the nascent field that researchers today would find hard to remember. For example, our hearty band constantly worried if any scholarly journal would publish the papers we wrote. Sources of research funding were hard to find and difficult to maintain. MEMS fabrication was itself a major issue. | M E M S MICROELECTROMECHANICAL SYSTEMS SERIES An Introduction to Microelectromechanical Systems Engineering SECOND EDITION NADIM MALUF KIRT WILLIAMS An Introduction to Microelectromechanical Systems Engineering Second Edition For a listing of recent titles in the Artech House Microelectromechanical Systems MEMS Series turn to the back of this .
