Tham khảo tài liệu 'mems advanced materials and fabrication methods - nat. aca. press part 7', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | Microelectromechanical Systems Advanced Materials and Fabrication Methods 1997 http openbook 0309059801 html copyright 1997 2000 The National Academy of Sciences all rights reserved NEW MATERIALS AND PROCESSES 29 Tobushi et al. 1996 . The phase-transition temperature is near to room temperature in many of these materials. Considerable research is required to determine their possible application to MEMS however. Magnetostrictive Alloys Magnetostrictive alloys like TERFENOL-D TblxDyxFe2 function well as sensors and actuators Hathaway and Clark 1993 in the macro scale. A large number of macroscale magnetomechanical transducers and actuators utilizing TERFENOL-D have been designed and manufactured. The high energy density of these actuators plus their ruggedness and reliability make them attractive for vibration suppression and high-power sonar. A macroscopic resonant magnetostrictive rotating motor has been reported that can produce a torque of 2 Nm at the low rotating speed of 100 degrees per second Claeyssen et al. 1996 . Thin films of magnetostrictive rare-earth iron alloys can be sputtered on silicon and patterned by etching or sputtering through masks. Micropump and microvalve membranes and cantilevers are targeted MEMS components Quandt Gerlach and Seemann 1994 but little has been reported thus far on the incorporation of magnetostrictive materials into an IC-derived process. Processing Advances in the use of new materials novel powdersynthesis methods and ceramic integration are being made in electronic ceramics at scales much greater than those typical of MEMS. Monolithic multifunctional components take advantage of four existing technologies thick-film methods and materials multilayer ceramics capacitor processes cofired package concepts and thin-film deposition on silicon and other substrates. Processing Multilayer Ceramics Improved processing and manufacturing of multilayer ceramics especially for capacitors and microelectronic packages
