Tham khảo tài liệu 'micro electro mechanical system design - james j. allen part 7', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | Design Realization Tools for MEMS 161 FIGURE Layout of the seismic mass level of an accelerometer utilizing only one drawing layer. FIGURE Layout of the seismic mass level of an accelerometer utilizing two layers. 2005 by Taylor Francis Group LLC 162 Micro Electro Mechanical System Design FIGURE Use of a bit by bit XOR logical function to combine layers layer and layer_CUT to form a mask definition. FIGURE Alternative approaches to layout of an annular MMPOLY2 feature. 2005 by Taylor Francis Group LLC Design Realization Tools for MEMS 163 FIGURE Alternative approaches to the layout of an MMPOLY2 island inside an MMPOLY2 annular feature. SUMMiT. Because surface micromachining is an alternating stack of two types of materials . structural and sacrificial mechanical layers are attached by etching a hole or via in the sacrificial material this enables the next mechanical layer material deposited to attach to the mechanical material below at the via. Figure shows SEM images of various layers of SUMMiT anchored to each other. The attachment between the layers at the via produced by the SACOX_CUT can be seen between the adjacent layers. The term SACOX_CUT refers to a generic operation of opening a via in a sacrificial oxide layer to allow attachment of adjacent structural layers. SACOX _CUT is the use of a SACOX_CUT on a specific SACOX layer. A particular layer cannot be directly anchored to ground in the SUMMiT technology because deep SACOX_CUTs are not allowed. The SACOX_CUT 2005 by Taylor Francis Group .
