Tham khảo tài liệu 'microengineering mems and interfacing - danny banks part 7', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 100 Microengineering MEMS and Interfacing A Practical Guide box for setting up display user units and their relationship to lambda and the internal units half millimicrons . one internal unit will be nm . It is usually possible to create a design using either micrometers or lambda units. The latter are generally used for circuitry and not for micromachined devices or structures. When moving to a new IC fabrication process with a smaller feature size the value of lambda is scaled appropriately so that the design need not be recreated from scratch. The software may offer an option to indicate which parts of a design can be scaled and which cannot . bonding pads . In such a case it may be possible to create scalable designs that combine microstructures with circuitry but the process is generally difficult to implement. Units in Summary Internal units User units Lambda units Used by the software Used to create the design usually in micrometers and usually set to about 1000 internal units Half the minimum feature size Further Caveats One additional thing to be aware of is the use of hidden or reserved layer names that the software may use for its own purposes. This will be software dependent and will restrict the use of names within a design created using that package. For instance background may be a reserved name allowing one to vary the background of the drawing area. Graphics One difference between a layout editor and a normal drawing software is the scale over which the design is drawn. A layout will range from features as small as 1 dm up to a design that covers an entire wafer 100 mm a difference of 100 000 times. The layout editor software should provide an option that will prevent it from trying to draw very fine detail when a large area of the design is being viewed this may be automatic in some packages. The normal approach is to prevent the software from attempting to draw anything that takes up less than a specified number of pixels
