Tham khảo tài liệu 'micromechanical photonics - h. ukita part 2', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 10 1 From Optical MEMS to Micromechanical Photonics absorption rate is proportional to the square of the incident light intensity a 3-D structure is fabricated by scanning he fouusdd spot of a near-infraredwavelength beam in three dimensions inside the resin. The lateral and depth resolutions are said to and pm respectively. After that they also succeeded in fabricating a miafomorar -ized oow with a reoolutíon of 140 nm . Replication Replication from a mold is important technology for realizing lower cost and mass production. For optical MEMS applications the use of sol-gels which become glass-like material upon curing is foreseen. ORMOCER US-S1 is such a material. It is optically transparent over the wavelength from 100 to 1600 nm and has a refractive index of at 588 nm. Obi et al. replicated many sol-gel micro-optical devices and optical MEMS including a ool-gel eantrleveo hh a microlens on the top . Monolithic Integration Micromachining for an LD Monolithic integration of micromechanics is possible not only on a Si substrate but also on a semiconductor LD substrate of GaAs or InP . A smooth etched surface and a deep vertical sidewall are necessary for good lasingcharacteristics of LDs. For fabricating a refonaot 1II ir coral 1 It Ĩ Iv err N C orr exampee herre rec three micromachining tteps Fig. . a An etch-fSop Inyeo of GIGaAs is formed in an LD structure prepared by metalorganic vapor phase epitaxy MOVPE . b The microstructure shape is precisely defined by a reactive dry-etchingtechnique which simultaneously forms the vertical etched a GaAs cap AlGaAs clad ------------Active layer AlGaAs clad GaAs AlGaAs etch-stop layer GaAs substrate ------------ c d b Cl2 beam Il Resist mask Microcantilever Etched mirror MC 1 - - - SaAs substrate y Fig. . Steps in the fabrication of a GaAs AlGaAs resonant microcantilever MC integrated with a laser diode LD Miniaturized Systems with Microoptics and Micromechanics 11 mirror
