Tham khảo tài liệu 'micromechanical photonics - h. ukita part 3', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 30 1 From Optical MEMS to Micromechanical Photonics direction in which many devices are under development black circles as seen in the same figure. Much work is needed to reach the final goal. Good mechanical properties high speed and strong power are foreseen for microdevices. Microassembly packing and wiring techniques must be improved. Tribology on the microscale must be studied to realize smooth motion. In the following chapters we highlight key technologies in the development of future optical MEMS micromechanical photonics devices and describe not only theoretical and experimental results but also their fields of application. Chap. 2 deals with LD closely aligned with a microstructure such as a diaphragm a microcantilever and a slider. As examples we examine extremely short-external-cavity LDs such as a tunable LD a resonant sensor and an integrated optical head. Chap. 3 addresses optical tweezers. The new technology is employed to manipulate various types of objects in a variety of research and industrial fields. Chap. 4 deals with the design and fabrication of an optical rotor and the evaluation of the mixingperformance of microliquids for a future fluidic applications such as p-TAS. In Chap. 5 the fundamentals and applications of the near field induced on an object surface are described for the future development of micromechanical photonics. This technology enables us to carry out observing reading writing and fabrication beyond the wavelength resolution by accessing and controlling the near field. Problems . Compare the methods of fabricating optical MEMS micromcchanical photonics devices. . Explain the working mechanism of a sac-rihc-otI aayer in he fabrication of microdevices. . Explain the problems to be solved for a miniaturized device. . Estimate the reduction of torque required to tilt a micromirror with a 50 reduction of the dimensions the mirror is a X b in area and t thick . . Why does response time become fast in a microsystem .
