Tham khảo tài liệu 'microsensors, mems and smart devices - gardner varadhan and awadelkarim part 18', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | Index Accelerometer 263-5 hybrid 414-16 MEMS-IDT 398-412 smart 422 Acceptor atoms 28 Acoustic device plate mode 328-30 various types 316 see also SAW microsensor Acoustic wave 380-14 in solids 320-350 instrumentation 337-8 Love 312-14 propagation 320-1 325-34 shear horizontal 311-12 velocity 311 Actuator representation 228 smart 419 see also Microactuator Adhesion problems 170-1 AGC SAW circuit 341 AMANDA process 213-5 Anisotropic wet etching 118-24 Anodic bonding 140-3 see also Bonding Antenna 365 413 433 see also Microantenna APCVD 12 APM 328-30 Application-specific IC 62 see also ASIC Array fibre-optic 186 ASIC 62 112-16 relative costs 116 technologies 114 Atomic bonding 40-4 one-electron model 35 Axle micro 214 Avalanche diode 243-4 see also Diode AZ-1350J 20 75 see also Resist Bacteria detection 426 Ball grid array 111-12 see also Bonding BCC 47 BGA 111-12 see also Bonding Bio chemical microsensor 280-299 calorimetric 297-9 classification of 282 potentiometric 292-9 resistive 283-96 Biochip 438-42 BioMEMS chip 438-42 Biosensor see Biochemical microsensor Bipolar diode 80 processing 73-82 resistor 81 transistor 88 BJT characteristics 82-90 Body-centred cubic 47 Bonding anodic 140-3 atomic 40-4 ball grid array 111-12 covalent 43 die 100-1 flip-TAB 103 ionic 42 metallic 43-4 silicon fusion 138-40 494 INDEX Bonding Continued tape-automated 101-3 wire 100-1 Boron etch-stop 125 see also Etch-Stop technique Bulk micromachining 117-144 see also Etching Buried oxide process 137 Calorimetric gas microsensor 297-9 Camera web 423-4 Cantilever beam deflection 249-51 fabrication 133-4 136-7 worked example 123-4 133-7 Car micro 198 Carbon structure 48 Carrier concentration intrinsic 31 Catalytic-gate MOSFET 293 see also MOSFET CB configuration 86 cc configuration 86 CCD 423-4 commercial 424 CE configuration 86 Ceramic materials 58 MSL 197-201 PCBs 108 Chemical microsensor see Bio chemical microsensor Chlorine molecule bonding 43 Circuit SAW oscillator 342 see also Equivalent
