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Microengineering, MEMS, and Interfacing A Practical Guide

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The fundamental aim of microengineering — to take a design from a computer aided design (CAD) software package and manifest it in a physical manner — may be achieved through one of a number of different fabrication or micromachining technologies. Many of these technologies employ a process known generally as photolithography , or a variation of this process, to transfer a two-dimensional pattern from a mask into the structural material. The mask is created from the data held by the CAD package, and the structure is built up by a series of steps that involve the deposition (addition of material to the structure) and etching (removing material from the.

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Microengineering MEMs and Interfacing - Danny Banks Part 1

Microengineering MEMs and Interfacing - Danny Banks Part 2

Microengineering MEMs and Interfacing - Danny Banks Part 3

Microengineering MEMs and Interfacing - Danny Banks Part 4

Microengineering MEMs and Interfacing - Danny Banks Part 5

Microengineering MEMs and Interfacing - Danny Banks Part 6

Microengineering MEMs and Interfacing - Danny Banks Part 7

Microengineering MEMs and Interfacing - Danny Banks Part 8

Microengineering MEMs and Interfacing - Danny Banks Part 9

Microengineering MEMs and Interfacing - Danny Banks Part 10
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