Library of Congress Cataloging-in-Publication Data Lyshevski, Sergey Edward. Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski. p. cm. -- (Nano- and microscience, engineering, technology, and medicine series) Includes index. Includes bibliographical references and index. ISBN 0-8493-916-6 (alk. paper) 1. Microelectromechanical systems. 1. Title. II. Series. This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources are indicated. A wide.
