VNU. JOURNAL OF SCIENCE, Mathematics - Physics, , n02, 2005 Nguyen Thi Minh Hanga,b, Chien-Hung Hoc, Vu Ngoc Hungb, Nguyen Phu Thuyb,d a d Center for Micro Electronic and Information Technology (IMET) International Training Institute for Materials Science (ITIMS) c Precision Instrument Development Center (PIDC) College of Technology, Vietnam National University, Hanoi (VNU) b Abstract. Thanks to almost transparent property of SU8 for wavelength of 365400nm, UV-LIGA technology using this photoresist has been applied to fabricate high-aspect-ratio (HAR) microstructures. This allows transferring patterns with vertical sidewall from masks to the photoresist. This paper introduces UV-LIGA and its application in fabricating comb drive structure for an angular.
