This paper presents the results of an experimental study of three samples containing various elements in the near-surface layers. The depth profiles of all the elements of different atomic masses from hydrogen to silver were investigated by Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA). The experiments were performed by using the low-energy (about 2 MeV) 4He+ ion beams. | Communications in Physics, Vol. 26, No. 1 (2016), pp. 83-92 DOI: ANALYTICAL POSSIBILITIES OF RUTHERFORD BACKSCATTERING SPECTROMETRY AND ELASTIC RECOIL DETECTION ANALYSIS METHODS VU DUC PHU AND LE HONG KHIEM† Institute of Physics, Vietnam Academy of Science and Technology, 10 Dao Tan, Ba Dinh, Hanoi, Vietnam A. P. KOBZEV AND M. KULIK? Frank Laboratory of Neutron Physics, Joint Institute for Nuclear Research, 141980 Dubna, Russia ? Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland † E-mail: lhkhiem@ Received 29 April 2016 Accepted for publication 21 June 2016 Abstract. This paper presents the results of an experimental study of three samples containing various elements in the near-surface layers. The depth profiles of all the elements of different atomic masses from hydrogen to silver were investigated by Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA). The experiments were performed by using the low-energy (about 2 MeV) 4 He+ ion beams. The obtained results demonstrate the possibility of the RBS and ERDA methods in the investigation of depth profiles of any mass element with an atomic concentration of about at.% and a depth resolution around 10 nm. Keywords: Rutherford backscattering spectrometry; elastic recoil detection analysis; depth profile; ion beam analysis. Classification numbers: ; ; . I. INTRODUTION The RBS and ERDA methods are widely used for solving various scientific and applied problems [1–4]. The basic physical principles underlying the RBS and ERDA methods will be presented in the next parts of this paper. The implementation of these methods requires a monochromatic beam of low-energy charged particles. A beam of helium ions generated by an electrostatic generator is best suited for this purpose. In the case of RBS, the ions are observed c 2016 Vietnam Academy of Science and .
