Part 1 book "Electrical atomic force microscopy for nanoelectronics" includes content: The atomic force microscopy for nanoelectronics; conductive afm for nanoscale analysis of high K dielectric metal oxides; mapping conductance and carrier distributions in confined three dimensional transistor structures; scanning capacitance microscopy for two dimensional carrier profiling of semiconductor devices; oxidation and thermal scanning probe lithography for high resolution nanopatterning and nanodevices. |
