Tham khảo tài liệu 'coatings technology handbook episode 1 part 10', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 31-30 Coatings Technology Handbook Third Edition 42. A. Etspuler and H. Suhr J. Appl. Phys. A48 373 1989 . 43. E. Feurer S. Kraus and H. Suhr J. Vac. Sci. Technol. A7 2799 1989 . 44. H. Holzschuh and H. Suhr J. Appl. Phys. A51 486 1990 . 45. H. Holzschuh and H. Suhr Appl. Phys. Lett. 59 470 1991 . 46. M. D. Hudson C. Trundle and C. J. Brierly J. Mater. Res. 3 1151 1988 . 47. R. A. Kant and G. K. Huber Surf. and Coat. Technol. 51 247 1992 . 48. R. Prange R. Cremer D. Neuschutz Surf. and Coat. Technol 133-134 208-214 2000 . 49. E. Kubel Metall. Powder Rep. 43 832 1988 . 50. B. Leon A. Klumpp M. Perez-Amor and H Sigmund Appl. Surf. Sci. 46 210 1990 . 51. Y. S. Liu in Tungsten and Other Refractory Metals for VLSI Applications. R. L. Blewer Ed. Mater. Res. Soc. Proc. 43 1985 . 52. C. Mitterez M. Rauter and P. Rodhammer Surf. and Coat. Technol. 41 351 1990 . 53. S. Motojima and H. Mizutani Appl. Phys. Lett. 54 1104 1989 . 54. A. Chayahara H. Yokoyama T. Imura and Y. Osaka Appl. Surf. Sci. 33 34 561 1988 . 55. C. Oehr and H. Suhr J. Appl. Phys. A49 691 1989 . 56. D. Hofmann S. Kunkel H. Schussler G. Teschner R. Gruen Surf. and Coat. Technol 81 146-150 1996 . 57. R. D. Arnell Surf. and Coat. Technol. 43 44 674 1990 . 58. E. Bergmann E. Moll in Plasma Surface Engineering Vol. 1. E. Broszeit W. Muenz H. Oechsner G. Wolf Eds Heidelberg DGM-Verlag Oberursel 1989 p. 547. 2006 by Taylor Francis Group LLC 32 Cathodic Arc Plasma Deposition H. Randhawa Vac-Tec Systems Inc. Cathodic Arc Plasma Deposition Cathodic Arc Cathodic Arc Emission Recent Introduction The cathodic arc plasma deposition CAPD method1 2 of thin film deposition belongs to a family of ion plating processes that includes evaporative ion plating3 4 and sputter ion 6 However the CAPD process involves deposition species that are highly ionized and posses .
