Design and Simulation of A CMOS-MEMS Accelerometer | Design and Simulation of A CMOS-MEMS Accelerometer by Gang Zhang . Tsinghua University 1994 A Project Report Submitted to the Graduate School In Partial Fulfillment of the Requirements for the Degree of Master of Science in Electrical and Computer Engineering CARNEGIE MELLON UNIVERSITY Research Advisor Professor Gary K. Fedder Second Reader Professor L. Rick Carley May 1998 Technical Report Version Table of Contents 1 2 Sensing Element Mechanical Design and Spring . Damping and Quality Vertical Stress Gradient Compensation with Curl Matching Fully Differential Capacitive Bridge Gap Capacitance of Composed Comb . Capacitive Bridge . Sensor . Electrostatic Electrical Spring Electrostatic Force Feedback 3 Electrical Interface Circuitry Front-end Demodulator Noise Brownian noise .26 Front-end Thermal Noise of MOS Diode Electronic Noise vs. Mechanical Noise .28 Quantization 4 System Simulations .30 Introduction .30 Simulation 1 5 Experimental Experimental 6 7
