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An Introduction to Microelectromechanical Systems Engineering P1

For a listing of recent titles in the Artech House Microelectromechanical Systems (MEMS) Series, turn to the back of this book. .An Introduction to Microelectromechanical Systems Engineering Second Edition Nadim Maluf Kirt Williams Artech House, Inc. Boston • London www.artechhouse.com .Library of Congress Cataloging-in-Publication Data A catalog record for this book is available from the U.S. Library of Congress. British Library Cataloguing in Publication Data Maluf, Nadim. An Introduction to microelectromechanical systems engineering–2nd ed. –(Artech House microelectromechanical library) 1. Microelectromechanical systems I. Title II. Williams, Kirt 621.3’81 ISBN 1-58053-590-9 Cover design by Igor Valdman © 2004 ARTECH HOUSE, INC. 685 Canton Street Norwood, MA 02062 All rights. | M E M S MICROELECTROMECHANICAL SYSTEMS SERIES An Introduction to Microelectromechanical Systems Engineering SECOND EDITION NADIM MALUF KIRT WILLIAMS An Introduction to Microelectromechanical Systems Engineering Second Edition For a listing of recent titles in the Artech House Microelectromechanical Systems MEMS Series turn to the back of this .