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Impact of evaporation rate on multi-layer antireflective film quality using SiO2 /SiO material pairs

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This paper presents the results of research, calculation, manufacturing of three-layer antireflective coating using SiO2 /SiO material pairs on BOC ADWARDS FL500 vacuum evaporator. The results are used to evaluate the effect of film evaporation rate on the quality of multi-layered anti-reflective coating, in the near infrared and short wavelength infrared region. |

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