Đang chuẩn bị liên kết để tải về tài liệu:
The Materials Science of Thin Films Episode 14

Tham khảo tài liệu 'the materials science of thin films episode 14', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 628 Modification of Surfaces and Films 24. J. K. Hirvonen and c. R. Clayton in Surface Modification and Alloying eds. J. M. Poate G. Foti and D. Jacobson Plenum Press New York 1983 . 25. G. K. Wehner J. Vac. Sci. Tech. A3 1821 1985 . 26. p. Auciello and R. Kelly Ion Bombardment Modification of Surfaces Fundamentals and Applications Elsevier Amsterdam 1984 . 27. J. L. Whitton G. Carter and M. J. Nobes Radiation Effects 32 129 1977 . 28. G. K. Celler Solid State Technology 30 3 69 1987 . 29. A. E. White and K. T. Short Science 241 8 930 1988 . Emerging Thin-Film Materials and Applications In this final chapter an attempt is made to present a perspective of some emerging thin-film materials and applications that promise to have a significant impact on future technology. For this reason the discussion will be limited to the following topics 14.1. Film-Patterning Techniques 14.2. Diamond Films 14.3. High Tc Superconductor Films 14.4. Films for Magnetic Recording 14.5. Optical Recording 14.6. Integrated Optics 14.7. Superlattices 14.8. Band-Gap Engineering and Quantum Devices This potpourri of subjects encompasses covalent metallic and semiconductor film materials deposited by an assortment of PVD and CVD methods. Represented are mechanical electrical magnetic and optical properties whose optimization hinges on both processing and the ability to characterize structure-property relationships. Thus the spirit of materials science of thin films the theme and title of this book is preserved in microcosm within this chapter. For completeness however it is necessary to start with Section 14.1 629 630 Emerging Thin-Film Materials and Applications which is devoted to the topic of thin-film patterning techniques. This subject is crucial to the realization of the intricate lateral geometries and dimensions that films must assume in varied applications particularly some of those in this chapter. 14.1. Film-Patterning Techniques 14.1.1. Lithography Until now the only film dimension