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Bishop, Robert H. - The Mechatronics Handbook [CRC Press 2002] Part 5

Tham khảo tài liệu 'bishop, robert h. - the mechatronics handbook [crc press 2002] part 5', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 14 Rotational and Translational Microelectromechanical Systems MEMS Synthesis Microfabrication Analysis and Optimization 14.1 Introduction Sergey Edward Lyshevski 14.2 14.3 14.4 14.5 14.6 MEMS Motion Microdevice Classifier and Structural Synthesis MEMS Fabrication Bulk Micromachining Surface Micromachining LIGA and LIGA-Like Technologies MEMS Electromagnetic Fundamentals and Modeling MEMS Mathematical Models Example 14.5.1 Mathematical Model of the Translational Microtransducer Example 14.5.2 Mathematical Model of an Elementary Synchronous Reluctance Micromotor Example 14.5.3 Mathematical Model of Two-Phase Permanent-Magnet Stepper Micromotors Example 14.5.4 Mathematical Model of Two-Phase Permanent-Magnet Synchronous Micromotors Control of MEMS Proportional-Integral-Derivative Control Tracking Control Time-Optimal Control Sliding Mode Control Constrained Control of Nonlinear MEMS Hamilton-Jacobi Method Constrained Control of Nonlinear Uncertain MEMS Lyapunov Method Example 14.6.1 Control of Two-Phase Permanent-Magnet Stepper Micromotors Purdue University Indianapolis 14.7 Conclusions 2002 CRC Press LLC 14 Rotational and Translational Microelectromechanical Systems MEMS Synthesis Microfabrication Analysis and Optimization 14.1 Introduction Sergey Edward Lyshevski 14.2 14.3 14.4 14.5 14.6 MEMS Motion Microdevice Classifier and Structural Synthesis MEMS Fabrication Bulk Micromachining Surface Micromachining LIGA and LIGA-Like Technologies MEMS Electromagnetic Fundamentals and Modeling MEMS Mathematical Models Example 14.5.1 Mathematical Model of the Translational Microtransducer Example 14.5.2 Mathematical Model of an Elementary Synchronous Reluctance Micromotor Example 14.5.3 Mathematical Model of Two-Phase Permanent-Magnet Stepper Micromotors Example 14.5.4 Mathematical Model of Two-Phase Permanent-Magnet Synchronous Micromotors Control of MEMS Proportional-Integral-Derivative Control Tracking Control Time-Optimal Control Sliding Mode Control Constrained Control of